Study on magnetron sputtering preparation of MoFe/nitrides and their ammonia synthesis performances

JIA Zhiyi; LIU Hongyan; XIA Limin; GUO Yanwen; ZHANG Yanran; REN Zekai; MENG Yuanyaun; DING Chuanmin

doi:10.12434/j.issn.2097-2547.20260043

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Study on magnetron sputtering preparation of MoFe/nitrides and their ammonia synthesis performances

更新时间：2026-06-05

- Study on magnetron sputtering preparation of MoFe/nitrides and their ammonia synthesis performances
- Pages: 1-8(2026)
- 作者机构：
  
  太原理工大学化学与化工学院，山西太原 030024
- 作者简介：
- 基金信息：
- DOI：10.12434/j.issn.2097-2547.20260043
  CLC： TQ113.2
- Received：27 January 2026，
  
  Revised：2026-02-27，
  
  Online First：02 June 2026，
- 稿件说明：
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贾志怡,刘红艳,夏利民等.MoFe/氮化物的磁控溅射制备及其合成氨性能研究[J].低碳化学与化工,

JIA Zhiyi,LIU Hongyan,XIA Limin,et al.Study on magnetron sputtering preparation of MoFe/nitrides and their ammonia synthesis performances[J].Low-Carbon Chemistry and Chemical Engineering,
贾志怡,刘红艳,夏利民等.MoFe/氮化物的磁控溅射制备及其合成氨性能研究[J].低碳化学与化工, DOI：10.12434/j.issn.2097-2547.20260043.

JIA Zhiyi,LIU Hongyan,XIA Limin,et al.Study on magnetron sputtering preparation of MoFe/nitrides and their ammonia synthesis performances[J].Low-Carbon Chemistry and Chemical Engineering, DOI：10.12434/j.issn.2097-2547.20260043.

摘要

氮空位与功函数是调

控非金属氮化物催化合成氨性能的关键因素，但传统化学合成法难以精准控制。为探究氮空位浓度与功函数如何调控合成氨催化性能，采用绿色高效的射频磁控溅射法，以高纯N

为溅射气体，在SiO

衬底上制备了氮化硼（BN）、氮化碳（CN）和氮化硼碳（BCN）3种非金属氮化物薄膜，并进一步沉积MoFe合金制备了复合催化体系（MoFe/BN、MoFe/CN和MoFe/BCN）。运用EPR、UPS和XPS等表征方法，对氮空位浓度、功函数及催化剂表面电子态进行了分析，并在微型固定床反应器中评价了催化剂热催化合成氨性能。结果表明，磁控溅射制备的3种氮化物均富含氮空位（

因子 ≈ 2.004），功函数分别为2.47 eV（CN）、2.53 eV（BCN）和4.46 eV（BN）。在800 ℃、环境气压条件下，MoFe/CN的氨生成速率达72.98 μg/(g·h)，显著高于MoFe/BN、MoFe/BCN及纯MoFe。XPS结果证实了CN载体通过强金属-载体相互作用向MoFe转移电子，将Mo、Fe还原至更低氧化态。综上，磁控溅射技术可实现氮空位与功函数的协同调控，低功函数CN载体通过界面电子转移优化MoFe活性中心的电子结构，从而提升了合成氨反应性能。

Abstract

Nitrogen vacancies and work function are key factors regulating the catalytic performance of non-metal nitrides for ammonia synthesis

whereas precise control by conventional chemical synthesis methods remains difficult. To investigate how nitrogen vacancy concentration and work function regulate the catalytic performance of ammonia synthesis

green and efficient radio frequency magnetron sputtering was employed to prepare boron nitride (BN)

carbon nitride (CN) and boron carbon nitride (BCN) non-metal nitride thin films on SiO

substrates using high-purity N

as the sputtering gas

and MoFe alloy was further deposited to construct composite catalytic systems (MoFe/BN

MoFe/CN and MoFe/BCN). EPR

UPS and XPS characterization methods were employed to analyze the nitrogen vacancy concentration

work function and surface electronic states of the catalysts

and the thermocatalytic ammonia synthesis performance was evaluated in a micro-fixed-bed reactor. The results show that the three nitrides prepared by magnetron sputtering are all rich in nitrogen vacancies (

-factor ≈ 2.004)

and their work functions are 2.47 eV (CN)

2.53 eV (BCN) and 4.46 eV (BN)

respectively. Under 800 ℃ and ambient pressure conditions

the ammonia formation rate of MoFe/CN reaches 72.98 μg/(g·h)

which is significantly higher than those of MoFe/BN

MoFe/BCN and pure MoFe. XPS resul

ts confirm that the CN support transfers electrons to MoFe through strong metal-support interactions

reducing Mo and Fe to lower oxidation states. In summary

magnetron sputtering technology can realize the synergistic regulation of nitrogen vacancies and work function

and the low-work-function CN support optimizes the electronic structure of MoFe active centers through interfacial electron transfer

thereby improving the ammonia synthesis performance.

关键词

Keywords

references

FENG Y Y , JIAO L , ZHUANG X , et al . The development, essence and perspective of nitrogen reduction to ammonia [J ] . Advanced Materials , 2025 , 37 ( 1 ): 2410909 .

LIU H Z . Ammonia synthesis catalyst 100 years: Practice, enlightenment and challenge [J ] . Chinese Journal of Catalysis , 2014 , 35 ( 10 ): 1619 - 1640 .

ZHANG Z H , ZHANG H J , JIANG H Y , et al . Green ammonia: Revolutionizing sustainable energy for a carbon-free future [J ] . Journal of Materials Chemistry A , 2024 , 12 ( 48 ): 33334 - 33361 .

MA X L , LIU J C , XIAO H , et al . Surface single-cluster catalyst for N 2 -to-NH 3 thermal conversion [J ] . Journal of the American Chemical Society , 2018 , 140 ( 1 ): 46 - 49 .

闫妍琼 , 王晓斌 , 陈海洁 , 等 . 强氧还原性氮化硼的制备及其催化甲烷部分氧化反应性能 [J ] . 低碳化学与化工 , 2024 , 49 ( 12 ): 27 - 32+46 .

YAN Y Q , WANG X B , CHEN H J , et al . Preparation of strongly oxygen reduction boron nitride and its catalytic performance for partial oxidation of methane [J ] . Low-Carbon Chemistry and Chemical Engineering , 2024 , 49 ( 12 ): 27 - 32+46 .

JIN H Y , LI L Q , LIU X , et al . Nitrogen vacancies on 2D layered W 2 N 3 : A stable and efficient active site for nitrogen reduction [J ] . Advanced Materials , 2019 , 31 ( 32 ): 1902709 .

WANG Z Q , GONG Y T , EVANS M L , et al . Machine learning-accelerated discovery of A 2 BC 2 ternary electrides with diverse anionic electron densities [J ] . Journal of the American Chemical Society , 2023 , 145 ( 48 ): 26412 - 26424 .

ZHOU S , YANG X W , XU X , et al . Boron nitride nanotubes for ammonia synthesis: Activation by filling transition metals [J ] . Journal of the American Chemical Society , 2020 , 142 ( 1 ): 308 - 317 .

LIU Y X , ZHANG H , CHENG X L . Unveiling the mechanism of nitrogen fixation by single-atom catalysts and dual-atom catalysts anchored on defective boron nitride nanotubes [J ] . Energy & Fuels , 2023 , 37 ( 17 ): 13271 - 13281 .

ZHANG L Y , MENG Y , KOSO A , et al . The mechanism of nitrogen reduction reaction on defective boron nitride (BN) monolayer doped with monatomic Co, Ni, and Mo-A first principles study [J ] . Colloids and Surfaces A: Physicochemical and Engineering Aspects , 2022 , 647 : 129072 .

LIU L , MIN L F , ZHANG W , et al . Dual roles of graphitic carbon nitride in the electrosynthesis of ammonia under ambient conditions [J ] . Journal of Materials Chemistry A , 2021 , 9 ( 48 ): 27518 - 27528 .

ZANDER J , TIMM J , WEISS M , et al . Light-induced ammonia generation over defective carbon nitride modified with pyrite [J ] . Advanced Energy Materials , 2022 , 12 ( 43 ): 2202403 .

SHI L , BI S N , QI Y , et al . Anchoring Mo single-atom sites on B/N codoped porous carbon nanotubes for electrochemical reduction of N 2 to NH 3 [J ] . ACS Catalysis , 2022 , 12 ( 13 ): 7655 - 7663 .

ZHAO X , ZHU Z , HE Y N , et al . Simultaneous anchoring of Ni nanoparticles and single-atom Ni on BCN matrix promotes efficient conversion of nitrate in water into high-value-added ammonia [J ] . Chemical Engineering Journal , 2022 , 433 : 133190 .

ZHANG K , ZHANG R , CUI Y X , et al . Tuning electronic environment of B sites in boron carbonitride nanoribbon boosts catalytic activity of reducing N 2 to NH 3 [J ] . Fuel , 2024 , 369 : 131750 .

GREED S . Unveiling the final nitrogenase [J ] . Nature Reviews Chemistry , 2023 , 7 ( 6 ): 379 - 379 .

ZHANG K , ZHANG R , CUI Y X , et al . Recent progress in 2D catalysts for photocatalytic and electrocatalytic artificial nitrogen reduction to ammonia [J ] . Advanced Energy Materials , 2021 , 11 ( 11 ): 2003294 .

VEITH G M , LUPINI A R , PENNYCOOK S J , et al . The use of magnetron sputtering for the production of heterogeneous catalysts [M ] // Studies in surface science and catalysis . Amsterdam : Elsevier , 2006 , 162 : 71 - 78 .

LE FEBVRIER A , LANDÄLV L , LIERSCH T , et al . An upgraded ultra-high vacuum magnetron-sputtering system for high-versatility and software-controlled deposition [J ] . Vacuum , 2021 , 187 : 110137 .

CALAMBA K M , SALAMANIA J , JÕESAAR M P J , et al . Effect of nitrogen vacancies on the growth, dislocation structure, and decomposition of single crystal epitaxi al (Ti 1- x Al x )N y thin films [J ] . Acta Materialia , 2021 , 203 : 116509 .

HARGREAVES J S J . Nitrides as ammonia synthesis catalysts and as potential nitrogen transfer reagents [J ] . Applied Petrochemical Research , 2014 , 4 ( 1 ): 3 - 10 .

CAI J H , WANG C Y , LIU Y , et al . Effect of pore-size distribution on Ru/ZSM-5 catalyst for enhanced N 2 activation to ammonia via dissociative mechanism [J ] . Journal of Rare Earths , 2020 , 38 ( 8 ): 873 - 882 .

吕岩 . NiFeCr金属催化剂的制备及用于甲烷部分氧化反应的研究 [D ] . 太原 : 太原理工大学 , 2023 .

LU Y . Preparation of NiFeCr metal catalyst and its application in partial oxidation of methane [D ] . Taiyuan : Taiyuan University of Technology , 2023 .

BISWAS A , KAPSE S , THAPA R , et al . Oxygen functionalization-induced charging effect on boron active sites for high-yield electrocatalytic NH 3 production [J ] . Nano-Micro Letters , 2022 , 14 ( 1 ): 214 .

CHEN Z Q , YE Y H , PENG T , et al . Iron-single sites confined by graphene lattice for ammonia synthesis under mild conditions [J ] . ACS Catalysis , 2023 , 13 ( 21 ): 14385 - 14394 .

LIU A M , LIANG X Y , YANG Q Y , et al . Electrocatalytic synthesis of ammonia using a 2D Ti 3 C 2 MXene loaded with copper nanoparticles [J ] . ChemPlusChem , 2021 , 86 ( 1 ): 166 - 170 .

TANG Y , KOBAYASHI Y , MASUDA N , et al . Metal-dependent support effects of oxyhydride-supported Ru, Fe, Co catalysts for ammonia synthesis [J ] . Advanced Energy Materials , 2018 , 8 ( 36 ): 1801772 .

ZHAO B B , HU W , GUAN C X , et al . Direct ammonia synthesis from nitrogen and water at mild conditions [J ] . Journal of the American Chemical Society , 2025 , 147 ( 51 ): 47654 - 47662 .

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