Research progress on metal organic framework materials for adsorption and separation of CF<sub>4</sub> and NF<sub>3</sub>

JING Xuliang; BAN Miaohan; YUAN Lan; ZHANG Wei

doi:10.12434/j.issn.2097-2547.20250210

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Research progress on metal organic framework materials for adsorption and separation of CF₄ and NF₃

更新时间：2026-06-25

- Research progress on metal organic framework materials for adsorption and separation of CF₄ and NF₃
- Vol. 51, Issue 6, Pages: 87-94(2026)
- 作者机构：
  
  西北化工研究院有限公司陕西省石油精细化学品重点实验室，陕西西安 710065
- 作者简介：
- 基金信息：
- DOI：10.12434/j.issn.2097-2547.20250210
  CLC： TQ028.1
- Received：06 May 2025，
  
  Revised：2025-06-09，
  
  Published：25 June 2026
- 稿件说明：
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景旭亮,班渺寒,袁岚等.金属有机框架材料吸附分离CF₄和NF₃的研究进展[J].低碳化学与化工,2026,51(6):87-94. DOI: 10.12434/j.issn.2097-2547.20250210.

JING Xuliang,BAN Miaohan,YUAN Lan,et al.Research progress on metal organic framework materials for adsorption and separation of CF₄ and NF₃[J].Low-Carbon Chemistry and Chemical Engineering,2026,51(6):87-94. DOI: 10.12434/j.issn.2097-2547.20250210.
景旭亮,班渺寒,袁岚等.金属有机框架材料吸附分离CF₄和NF₃的研究进展[J].低碳化学与化工,2026,51(6):87-94. DOI: 10.12434/j.issn.2097-2547.20250210. DOI：

JING Xuliang,BAN Miaohan,YUAN Lan,et al.Research progress on metal organic framework materials for adsorption and separation of CF₄ and NF₃[J].Low-Carbon Chemistry and Chemical Engineering,2026,51(6):87-94. DOI: 10.12434/j.issn.2097-2547.20250210. DOI：

摘要

和NF

是两种重要的含氟电子特气，但因两者性质相近，纯化和分离难度较大。金属有机框架（MOF）材料作为一种孔结构可调节的新型吸附剂，广泛用于含氟电子气体的选择性吸附。综述了MOF材料吸附分离CF

和NF

的研究进展，汇总了各种MOF材料的吸附量、CF

和NF

吸附选择性以及循环使用寿命等，分析了孔隙结构、金属中心路易斯酸性和配体取代基供电子能力等性质对其吸附性能的影响。在此基础上，重点探讨了MOF材料在CF

中微量NF

脱除以及NF

中微量CF

脱除方面的研究进展。高通量计算不仅可以快速获得各种MOF材料的吸附性能，还能为目标MOF材料的设计和优化提供指导。最后，分析了现有MOF材料在吸附分离CF

和NF

方面的不足，并对其未来研发方向进行了展望。

Abstract

and NF

are two important fluorinated electronic specialty gases

but due to their similar properties

the purification and separation are challenging. As a novel adsorbent with adjustable pore structure

the metal organic framework (MOF) materials are widely used for selective adsorption of gases. The research progress on various MOF materials applied to the adsorption and separation of CF

and NF

was reviewed. The adsorption capacity

and NF

adsorption selectivities and cycle life of various MOF materials were summarized. And the effects of pore diameter

Lewis acidity of metal centers

electron donating ability of ligand substituents and other key factors on the adsorption performance were analyzed. Based on thi

further research progress was explored on the removal of trace amounts of NF

from CF

and trace amounts of CF

from NF

by MOF materials. High throughput calculations can not only quickly obtain the adsorption performance of various MOF materials

but also provide guidance for the design and optimization of target MOF materials. Finally

the shortcomings of existing MOF materials in the adsorption and separation of CF

and NF

were analyzed

and the future research and development directions were discussed.

关键词

Keywords

references

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Research progress on metal organic framework materials for adsorption and separation of CF4 and NF3

DOI：10.12434/j.issn.2097-2547.20250210

摘要

Abstract

关键词

Keywords

references

Research progress on metal organic framework materials for adsorption and separation of CF₄ and NF₃