Research progress of area-selective atomic layer deposition in structural regulation of supported metal catalysts

WANG Chao; SUI Jiancai; YAN Mengxia; XU Dan; WU Baoshan; JIANG Xiaofeng; XIE Xiangyu

doi:10.12434/j.issn.2097-2547.20250446

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Research progress of area-selective atomic layer deposition in structural regulation of supported metal catalysts

更新时间：2026-04-27

- Research progress of area-selective atomic layer deposition in structural regulation of supported metal catalysts
- Pages: 1-9(2026)
- 作者机构：
  
  1.山东能源集团有限公司，山东济南 250014
  2.齐鲁工业大学（山东省科学院）能源研究所，山东济南 250014
  3.中科合成油技术股份有限公司国家能源煤基液体燃料研发中心，北京 101407
- 作者简介：
- 基金信息：
- DOI：10.12434/j.issn.2097-2547.20250446
  CLC： TQ426;O643.36
- Received：23 November 2025，
  
  Revised：2025-12-09，
  
  Online First：27 April 2026，
- 稿件说明：
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王超,隋建才,闫梦霞等.区域选择性原子层沉积调控负载型金属催化剂结构研究进展[J].低碳化学与化工,

WANG Chao,SUI Jiancai,YAN Mengxia,et al.Research progress of area-selective atomic layer deposition in structural regulation of supported metal catalysts[J].Low-Carbon Chemistry and Chemical Engineering,
王超,隋建才,闫梦霞等.区域选择性原子层沉积调控负载型金属催化剂结构研究进展[J].低碳化学与化工, DOI：10.12434/j.issn.2097-2547.20250446.

WANG Chao,SUI Jiancai,YAN Mengxia,et al.Research progress of area-selective atomic layer deposition in structural regulation of supported metal catalysts[J].Low-Carbon Chemistry and Chemical Engineering, DOI：10.12434/j.issn.2097-2547.20250446.

摘要

负载型金属催化剂是多相催化领域的重要分支，其结构的精准设计和调控可显著改善催化性能。与传统原子层沉积（ALD）不同，区域选择性原子层沉积（AS-ALD）可利用前驱体在基底表面不同区域成核行为的差异，实现前驱体在目标区域的选择性沉积，从而为高效稳定的负载型金属催化剂的制备提供新机遇。综述了AS-ALD在负载型金属催化剂微观结构调控方面的研究进展，主要包括核壳或纳米碗状结构催化剂构筑、金属纳米颗粒空间分布调控和金属纳米颗粒表面修饰等。目前，AS-ALD仍面临载体、抑制剂和沉积设备等方面的挑战，未来可重点在新型前驱体分子和抑制剂体系开发等方面寻求突破。

Abstract

Supported metal catalysts are important branches in the field of heterogeneous catalysis

and the reasonable design and regulation of catalyst structure could enhance effectively the catalytic performance. Unlike with traditional atomic layer deposition (ALD)

the area-selective atomic layer deposition (AS-ALD) can utilize the difference in the nucleation of precursors in different area of supports

which enables the precise deposition of precursors at specific sites and provides opportunity for obtaining catalyst with outstanding catalytic performance. The research progress of AS-ALD in structural regulation of supported metal catalysts was reviewed

including constructing catalysts with core-shell or nano-bowl structure

regulating the spatial distribution and modifying the surface structure of metal nanoparticles. The supports

inhibitors and deposition equipments all hinder the development of AS-ALD

and therefore the focus of future work can focus on the development of precursor and inhibitors.

关键词

Keywords

references

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